Industrial Automation
Testimonials
“I want to say thanks for the work you did to set up the simulator for me. It is turning out to be very helpful for modeling the throughput dynamics of development process. One key requirement to turn our 'development' best of breed tool into a 'production' win is to optimize the throughput. Having a local simulator is especially useful because I can test it using accurate recipes and configuration settings, and easily set up new test conditions, without the delays and mistakes inherent in working through a remote group several time zones away.”
A Semiconductor OEM
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Semiconductor OEM Equipment
- Real-time control software for
- Chamber sontrollers, FPD bonder
- Wafer handlers and robots
- Devices such as pumps, valves, gas panels
- Host communication and other protocols
- Carrier management, recipe management, scheduling, etc.
- Multi-axis motion and position control, robotics
- Algorithm realization
- Human Machine Interfaces (HMI)
Focus Areas
- Semi-plant simulation
- Automation software
- Recipe management
- Process configurator
- Defect classification
- FPD machines
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Stages where we have experience:
- Epitaxial silicon
- Dielectric deposition
- Reticle inspection
- Dry / wet etching
- Ion implantation
- Rapid thermal processing (oxidation, annealing)
- Metal deposition and electroplating
Expertise in Wafer Processing and Handling Systems
- E30 - GEM implementation at equipment controller
- Remote commands for host control
- E42 - Recipe upload, download, edit
- MID / PPID management
- Process job control
- Wafer handling interfaces for various vendors
- Interaction with AMHS for SEMI e.g. E84 PIO & E87 carrier management
- E87 - Carrier management system implementation of objects and state machines
- Host data management: Events and alarms handling, SVIDs, history logs
- Interfacing and control of mappers, aligners, robots, and CID readers
- E90 - Substrate tracking, E94 - Control job management, E40 - Process job management,
E95 - GUI, E84 - PIO
- SECS - I and II, HSMS
Sample Engagements
Wafer Inspection and Automatic Defect Classification System
Objective
- Enhance existing wafer inspection control software
- Add Automatic Defect Classification (ADC)
- Integrate third party tool
Solution
- ADC interface to support
- Initialization and shutdown control
- Recipe review and selection
- Result classification on
- Single image pair
- Double image pair
- Defect location and size information
- Download class defect file
- Image trimming – fixed and dynamic
- Developed tester for module testing in absence of integration testing
Service Features
- Proof-of-concept before finalizing requirements
- Fast ramp-up in new domain, iIndependent project handling
- Wipro Six Sigma tools for requirement development
Scheduling and Recipe Management for Wafer Plating
Objectives
Real-time control software and HMI increased yield.
Solution
- Complex scheduler algorithms
- User and recipe management
- Optimized carrier control for throughput
- Modular design (across machines)
- SQL server interface
- Alarm / data / event logging
- Historical archiving settings
- Pump calibration and control
- Multi-language switching
Semiconductor Plant Simulator Saves Millions of Dollars
Objectives
Generic across product lines easy-to-use, scalable and configurable .
 Solution
- Common framework for 200 and 300mm wafers
- Object-oriented, using design patterns, easy to customize for new / variants
- Dynamic configuration and wizards, configuration templates for different arrangements
- Hardware abstraction layer to evaluate new hardware
- Plug-able architecture for device modeling
- Real-time modeling, time compressed updates
- Fault generation
Benefits
- Verifies process design – better quality
- Low-cost experimentation and training
- Automates test procedures
- Time-compressed pre-testing, commissioning
- Marathon tests (20k wafers in sets of 100 )
- Reduces damage to million dollar rquipment
- Saves time, three weeks saved per equipment
Process Control Configurator
Objectives
- Realize business logic for process control block
- Integrate it with existing user database
Solution
- Designed process control strategies using composite and iterator design patterns for filtering and summarization plan
- Optimized algorithms for filter searching within the filter tree
- Delphi, MySQL, XML
- Data consolidation program, data treatment for temporal data series
- Temporal filtering through temporal or logistic window
- New data series through temporal transformation pre-processing
- Summarization to an indicator
- Custom or combined indicators via predefined or user's algorithms
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